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Semiconductor Power Devices are the heart of power electronics. They determine the performance, they allow new topologies with low losses. Since for the application not only the process in the semiconductor, but also the thermal and mechanical characteristics are essential, the content includes packaging and interconnection technologies. The book starts with basic semiconductor physics, followed by some aspects of production technology. Power diodes, thyristors, MOSFETs and IGBTs are explained in detail. Standard packaging technologies, materials and reliability investigations are discussed. Destructive mechanisms, limiting effects and ruggedness of power devices are presented including characteristic failure pictures. One chapter deals on device induced electromagnetic problems, finally power electronic system integration trends are exposed.