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Silicon Micromechanical Resonator
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This book presents a silicon micromechanical resonator based digital temperature sensing technique as well as an efficient local-thermal-isolation method. The micromechanical resonator based thermometry results into a lag-free temperature sensor suitable for high precision temperature control of the resonator. The thermal isolation technique includes the design of an integrated heater with the micromechanical resonator such that the mechanical suspension, electrical heating and thermal isolation are provided in a single compact structure. This results in reducing the power consumption by more than 20x and the thermal time constant by more than 50x. Further reduction in power consumption requires analysis of the resonator structure to maintain its mechanical integrity. An improved thermally isolated design using topology optimization is described. The final design provides both the thermal isolation as well as the mechanical isolation with the overall reduction in power consumption of 40x. Furthermore, these methods are simple enough to implement it into any existing MEMS fabrication process.
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